Wafer Detection Method Based on Multi-object Template Matching

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更新时间：2024-02-22

- Wafer Detection Method Based on Multi-object Template Matching
- Software Guide Vol. 23, Issue 2, Pages: 146-152(2024)
- 作者机构：
  
  上海理工大学光电信息与计算机工程学院，上海 200093
- 作者简介：
- 基金信息：
- DOI：10.11907/rjdk.231076
  CLC：
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高德傲,陈晓荣,张驰艺等.基于多目标模板匹配的晶圆芯片检测方法[J].软件导刊,2024,23(02):146-152.

GAO Deao,CHEN Xiaorong,ZHANG Chiyi,et al.Wafer Detection Method Based on Multi-object Template Matching[J].Software Guide,2024,23(02):146-152.
高德傲,陈晓荣,张驰艺等.基于多目标模板匹配的晶圆芯片检测方法[J].软件导刊,2024,23(02):146-152. DOI： 10.11907/rjdk.231076.

GAO Deao,CHEN Xiaorong,ZHANG Chiyi,et al.Wafer Detection Method Based on Multi-object Template Matching[J].Software Guide,2024,23(02):146-152. DOI： 10.11907/rjdk.231076.

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